Tsim qauv ntawmlub photonicncig lub vojrcuital
Photonic sib xyaw ua ke(PIC) feem ntau yog tsim los ntawm kev pab ntawm cov ntawv sau ua lej vim tias qhov tseem ceeb ntawm txoj kev ntev hauv kev cuam tshuam lossis lwm yam kev siv uas muaj kev nkag siab ntev.Picyog tsim los ntawm pattering ntau txheej (feem ntau 10) ntawm ib qho wafer, uas yog muaj los ntawm ntau cov duab polygonal, feem ntau sawv cev hauv GSII hom. Ua ntej xa cov ntaub ntawv mus rau lub photomask cov chaw tsim khoom, nws yog qhov xav tau kom muaj peev xwm simulate cov pic los xyuas qhov tseeb ntawm kev tsim. Kev sim ua kom faib ua ntau theem: qib qis tshaj yog peb-seem electromagnetic (em) Cov hau kev zoo li no suav nrog peb-sab kawg finite-qhov sib txawv ntawm lub sij hawm-sau (3D FDTD) thiab Eigenmode Expansion (EME). Cov hau kev no yog qhov tseeb tshaj plaws, tab sis yog impractical rau tag nrho pic simulation lub sijhawm. Qeb tom ntej yog 2.5-seem em simulation, xws li finite-txawv nqaj hais tawm (FD-BPM). Cov hau kev no tau nrawm dua, tab sis kev txi qee qhov raug thiab tsuas yog siv cov kev sib tham paraxial thiab tsis tuaj yeem siv los ntsuas resonators, piv txwv. Qeb tom ntej yog 2D EM simulation, xws li 2D FDTD thiab 2D BPM. Cov no tseem tau sai dua, tab sis muaj kev ua haujlwm tsawg, xws li lawv tsis tuaj yeem simulate polarization Rotators. Ib qib txuas ntxiv kis tau thiab / lossis tawg matrix simulation. Txhua qhov kev tiv thaiv loj yog txo kom muaj cov tswv yim nrog cov tswv yim nrog cov tswv yim thiab cov zis, thiab cov phiaj xwm sib txuas yog txo qis rau theem hloov pauv thiab ua kom tiav. Cov sim no tau ceev heev. Cov teeb liab tso zis tawm tau los ntawm huaj mias tes sib txuas lus sib kis los ntawm cov teeb liab tawm tswv yim. Qhov scattering matrix (nws cov ntsiab yog hu ua s-tsis yog) muab cov cim thiab tso tawm cov cim qhia ntawm ib sab thiab cov zis paib ntawm lwm sab ntawm cov khoom siv. Yeej, cov scattering matrix muaj qhov xav txog sab hauv lub caij. Lub scattering matrix feem ntau yog ob zaug loj npaum li cas raws li qhov kis tau sib kis hauv txhua qhov loj me. Hauv cov ntsiab lus, los ntawm 3D kom kis tau / scartering matrix simulation, txhua txheej ntawm kev ua lag luam tawm ntawm kev lag luam tawm ceev thiab qhov kev xav tau los ua kom zoo rau cov txheej txheem tsim qauv.
Txawm li cas los xij, kev vam khom rau hluav taws xob kev sim ntawm qee yam thiab siv matterating / hloov matrix mus rau simulation tag nrho cov qauv tsim ua ntej ntawm cov phaj txaus. Piv txwv li, miscalculated txoj kab ntev, multimode flutguides uas tsis muaj teeb meem rau ib leeg ua rau tsis muaj kev cuam tshuam nrog kev txiav txim siab thaum lub sijhawm simulation. Yog li ntawd, txawm hais tias cov cuab yeej sim siab tau muab cov peev txheej muaj peev xwm thiab kev paub txog kev ua kom paub tseeb thiab kev ntseeg tau ntawm cov qauv thiab txo qhov kev pheej hmoo ntawm cov Flow Sheet.
Ib txheej txheem hu ua kev sib tw FDTD tso cai rau 3D thiab 2D FDTD Simulations Yuav kom ua ncaj qha rau kev tsim qauv tiav los tsim qauv. Txawm hais tias nws yog qhov nyuaj rau ib qho cuab yeej siv hluav taws xob sim ua rau simulation loj heev teev pic, cov sparse FDTD muaj peev xwm los simulate qhov chaw ncaj ncees. Hauv cov tsoos 3D FDTD, kev simulation pib los ntawm kev pib ua ntu ntawm lub tshuab hluav taws xob tsis pub muaj cov ntim khoom. Raws li sijhawm nce qib, cov teb tshiab tiv thaiv hauv cov ntim yog suav, thiab lwm yam. Txhua kauj ruam yuav tsum muaj ntau xam, yog li nws siv sijhawm ntev. Hauv kev sib npaug 3D FDTD, tsis hais txog kev xam ntawm txhua kauj ruam ntawm txhua qhov chaw ntawm txhua qhov chaw ntawm txhua qhov ntawm cov khoom siv sib sau ua ke mus rau ib qho chaw loj loj thiab raug suav tsuas yog rau cov khoom siv ntawd. Ntawm txhua lub sijhawm kauj ruam, cov ntsiab lus uas nyob ib sab txuas rau cov cheeb tsam tau ntxiv, thaum cov cheebtsam hauv qab lub zog hluav taws xob tau poob. Rau qee cov qauv, cov kev suav no tuaj yeem yog ob peb xaj ntawm qhov ntau dua li yav dhau los 3D FDTD. Txawm li cas los xij, kev hais txog FDTDs tsis ua tau zoo thaum cuam tshuam nrog cov qauv dispersive vim tias lub sijhawm no teb kis ntau dhau, ua rau cov npe uas ntev thiab nyuaj rau kev tswj hwm. Daim duab 1 Pom ib qho piv txwv screenshot ntawm 3D FDTD simulation zoo ib yam li Polarization Baj Ntoo Splitter (PBS).
Daim duab 1: Sim ua cov txiaj ntsig los ntawm 3D Sparsd FDTD. (A) yog qhov pom saum toj kawg nkaus ntawm cov qauv simulated, uas yog qhov kev taw qhia txuas. (B) qhia pom tias ib qho kev sim ua cov qasi-te kev paub zoo. Ob daim duab kos saum toj no qhia rau sab saum toj pom ntawm Qasi-Te thiab Quasi-TM cov cim, thiab ob daim duab hauv qab no qhia cov qauv sib xws. (C) qhia pom tias muaj kev sim ua cov kev paub zoo.
Lub Sijhawm Post: Jul-23-2024