Lub tshuab photonic integrated circuit (PIC) cov khoom siv

Lub tshuab photonic integrated circuit (PIC) cov khoom siv

Silicon photonics yog ib qho kev qhuab qhia uas siv cov qauv planar raws li cov ntaub ntawv silicon los coj lub teeb kom ua tiav ntau yam haujlwm. Peb tsom mus rau qhov kev siv silicon photonics hauv kev tsim cov transmitters thiab receivers rau kev sib txuas lus fiber optic. Raws li qhov xav tau ntxiv ntau qhov kev sib kis ntawm qhov bandwidth, qhov chaw, thiab tus nqi nce ntxiv, silicon photonics ua rau muaj kev lag luam zoo dua. Rau qhov kho qhov muag,kev siv tshuab photonic sib koom ua keyuav tsum tau siv, thiab feem ntau cov coherent transceivers niaj hnub no yog tsim los ntawm kev siv cov LiNbO3/ planar light-wave circuit (PLC) modulators thiab InP/PLC receivers sib cais.

Daim Duab 1: Qhia txog cov khoom siv photonic integrated circuit (PIC) uas siv ntau.

Daim Duab 1 qhia txog cov khoom siv PIC nrov tshaj plaws. Txij sab laug mus rau sab xis yog silicon-based silica PIC (tseem hu ua PLC), silicon-based insulator PIC (silicon photonics), lithium niobate (LiNbO3), thiab III-V pawg PIC, xws li InP thiab GaAs. Daim ntawv no tsom mus rau silicon-based photonics. Hauvsilicon photonics, lub teeb liab feem ntau mus ncig hauv silicon, uas muaj qhov sib txawv ntawm 1.12 electron volts (nrog qhov ntev ntawm 1.1 microns). Silicon yog cog rau hauv daim ntawv ntawm cov siv lead ua ntshiab hauv cov cub tawg thiab tom qab ntawd txiav rau hauv wafers, uas niaj hnub no feem ntau yog 300 hli hauv txoj kab uas hla. Lub ntsej muag wafer yog oxidized los tsim ib txheej silica. Ib qho ntawm cov wafers yog bombarded nrog hydrogen atoms mus rau qee qhov tob. Ob lub wafers ces fused hauv lub tshuab nqus tsev thiab lawv cov txheej oxide sib txuas rau ib leeg. Lub rooj sib dhos tawg raws txoj kab hydrogen ion implantation. Lub txheej silicon ntawm qhov tawg ces polished, thaum kawg tawm hauv ib txheej nyias ntawm crystalline Si saum toj ntawm lub silicon "kov" wafer nyob rau saum lub txheej silica. Waveguides yog tsim los ntawm cov txheej nyias crystalline no. Thaum cov silicon-based insulator (SOI) wafers no ua rau cov silicon photonics waveguides qis-poob tau, lawv yeej siv ntau dua hauv cov voj voog CMOS qis-zog vim yog qhov xau qis uas lawv muab.

Muaj ntau hom kev siv silicon-based optical waveguides, raws li pom hauv Daim Duab 2. Lawv yog cov microscale germanium-doped silica waveguides mus rau nanoscale Silicon Wire waveguides. Los ntawm kev sib xyaw germanium, nws yog qhov ua tau los uaphotodetectorsthiab kev nqus hluav taws xobcov modulators, thiab tej zaum txawm tias cov amplifiers kho qhov muag. Los ntawm doping silicon, ib qhocov khoom siv kho qhov muagtuaj yeem ua tau. Hauv qab ntawm sab laug mus rau sab xis yog: silicon hlau waveguide, silicon nitride waveguide, silicon oxynitride waveguide, tuab silicon ridge waveguide, nyias silicon nitride waveguide thiab doped silicon waveguide. Nyob rau sab saum toj, ntawm sab laug mus rau sab xis, yog depletion modulators, germanium photodetectors, thiab germaniumcov khoom siv kho qhov muag.

Daim Duab 2: Ntu hla ntawm cov koob yees duab waveguide uas ua los ntawm silicon, qhia txog kev poob ntawm cov kab ke thiab cov ntsuas refractive.