Silicon photonics active element

Silicon photonics active element

Cov khoom siv Photonics nquag yog hais txog kev sib cuam tshuam dynamic tsim los ntawm lub teeb thiab cov khoom. Ib qho khoom siv nquag ntawm photonics yog lub modulator optical. Txhua yam tam sim no raws li siliconcov khoom siv kho qhov muagyog raws li cov nyhuv ntawm cov neeg nqa khoom dawb hauv plasma. Kev hloov tus lej ntawm cov electrons dawb thiab qhov hauv cov khoom siv silicon los ntawm doping, hluav taws xob lossis kho qhov muag tuaj yeem hloov nws cov refractive index nyuaj, ib qho txheej txheem qhia hauv cov qauv (1,2) tau txais los ntawm cov ntaub ntawv haum los ntawm Soref thiab Bennett ntawm qhov ntev ntawm 1550 nanometers. Piv nrog cov electrons, qhov ua rau muaj feem ntau ntawm cov kev hloov pauv refractive index tiag tiag thiab xav, uas yog, lawv tuaj yeem tsim cov kev hloov pauv theem loj dua rau qhov kev hloov pauv poob, yog li ntawd hauvMach-Zehnder modulatorsthiab cov modulators nplhaib, nws feem ntau yog nyiam siv cov qhov los uacov modulators theem.

Cov ntau yamsilicon (Si) modulatorcov hom tau qhia nyob rau hauv Daim Duab 10A. Hauv lub modulator txhaj tshuaj nqai, lub teeb nyob hauv intrinsic silicon hauv qhov dav heev pin junction, thiab electrons thiab qhov raug txhaj tshuaj. Txawm li cas los xij, cov modulators no qeeb dua, feem ntau nrog bandwidth ntawm 500 MHz, vim tias cov electrons dawb thiab qhov siv sijhawm ntev dua los sib xyaw tom qab txhaj tshuaj. Yog li ntawd, cov qauv no feem ntau siv ua tus hloov pauv optical attenuator (VOA) es tsis yog modulator. Hauv lub modulator depletion nqai, qhov teeb pom kev nyob hauv qhov nqaim pn junction, thiab qhov dav depletion ntawm pn junction hloov pauv los ntawm lub teb hluav taws xob siv. Lub modulator no tuaj yeem ua haujlwm ntawm qhov ceev ntau dua 50Gb / s, tab sis muaj qhov poob tom qab siab. Lub vpil ib txwm yog 2 V-cm2. Lub hlau oxide semiconductor (MOS) (qhov tseeb semiconductor-oxide-semiconductor) modulator muaj ib txheej oxide nyias nyias hauv pn junction. Nws tso cai rau qee qhov kev sib sau ua ke ntawm cov neeg nqa khoom thiab kev poob qis ntawm cov neeg nqa khoom, tso cai rau VπL me dua li 0.2 V-cm, tab sis muaj qhov tsis zoo ntawm kev poob ntawm qhov muag pom thiab lub peev xwm ntau dua ib chav ntev. Tsis tas li ntawd, muaj cov modulators nqus hluav taws xob SiGe raws li SiGe (silicon Germanium alloy) ntug kev txav mus los. Tsis tas li ntawd, muaj cov graphene modulators uas vam khom graphene los hloov ntawm cov hlau nqus thiab cov insulators pob tshab. Cov no qhia txog ntau yam kev siv ntawm ntau yam mechanisms kom ua tiav kev ua haujlwm ceev ceev, qis-poob optical teeb liab modulation.

Daim Duab 10: (A) Daim duab kos ntawm ntau yam qauv tsim kho qhov muag raws li silicon thiab (B) daim duab kos ntawm cov qauv tsim kho qhov muag.

Muaj ntau lub tshuab ntes teeb uas siv silicon nyob rau hauv Daim Duab 10B. Cov khoom siv nqus tau yog germanium (Ge). Ge muaj peev xwm nqus tau lub teeb ntawm qhov ntev txog li 1.6 microns. Qhia rau sab laug yog cov qauv pin uas ua tiav kev lag luam tshaj plaws niaj hnub no. Nws yog tsim los ntawm P-hom doped silicon uas Ge loj hlob. Ge thiab Si muaj 4% lattice mismatch, thiab txhawm rau txo qhov dislocation, ib txheej nyias ntawm SiGe yog thawj zaug loj hlob ua ib txheej buffer. N-hom doping yog ua rau saum Ge txheej. Ib lub photodiode hlau-semiconductor-hlau (MSM) yog qhia nyob hauv nruab nrab, thiab APD (Duab ntes av qeeg) tau qhia rau sab xis. Thaj chaw avalanche hauv APD nyob hauv Si, uas muaj cov yam ntxwv suab nrov qis dua piv rau thaj chaw avalanche hauv Pawg III-V cov ntaub ntawv elemental.

Tam sim no, tsis muaj kev daws teeb meem nrog qhov zoo pom tseeb hauv kev koom ua ke optical gain nrog silicon photonics. Daim duab 11 qhia ntau txoj kev xaiv tau teeb tsa los ntawm qib sib dhos. Ntawm sab laug deb yog monolithic kev koom ua ke uas suav nrog kev siv epitaxially grown germanium (Ge) ua cov khoom siv optical gain, erbium-doped (Er) iav waveguides (xws li Al2O3, uas xav tau optical pumping), thiab epitaxially grown gallium arsenide (GaAs) quantum dots. Lub kem tom ntej yog wafer rau wafer sib dhos, uas cuam tshuam nrog oxide thiab organic bonding hauv III-V pawg nce thaj tsam. Lub kem tom ntej yog chip-rau-wafer sib dhos, uas cuam tshuam nrog embedding III-V pawg chip rau hauv qhov ntawm silicon wafer thiab tom qab ntawd machining cov qauv waveguide. Qhov zoo ntawm thawj peb kem txoj hauv kev no yog tias lub cuab yeej tuaj yeem ua haujlwm tau zoo sim hauv wafer ua ntej txiav. Lub kem sab xis tshaj plaws yog chip-rau-chip sib dhos, suav nrog kev sib txuas ncaj qha ntawm silicon chips rau III-V pawg chips, nrog rau kev sib txuas ntawm lens thiab grating couplers. Qhov sib txawv ntawm kev siv lag luam yog txav mus los ntawm sab xis mus rau sab laug ntawm daim ntawv qhia mus rau kev sib koom ua ke thiab kev daws teeb meem ntau dua.

Daim Duab 11: Yuav ua li cas optical gain tau koom ua ke rau hauv silicon-based photonics. Thaum koj txav mus los ntawm sab laug mus rau sab xis, qhov chaw tsim khoom maj mam txav rov qab hauv cov txheej txheem.