Silicon photonics active caij

Silicon photonics active caij

Photonics active Cheebtsam hais tshwj xeeb rau txhob txwm tsim dynamic kev sib cuam tshuam ntawm lub teeb thiab teeb meem. Ib qho nquag nquag ntawm photonics yog qhov kho qhov muag modulator. Tag nrho cov tam sim no silicon-basedoptical modulatorsyog raws li cov nyhuv plasma free carrier. Hloov cov naj npawb ntawm cov hluav taws xob dawb thiab qhov nyob hauv cov khoom siv silicon los ntawm doping, hluav taws xob lossis kho qhov muag tuaj yeem hloov kho nws qhov kev cuam tshuam tsis zoo, cov txheej txheem qhia hauv qhov sib npaug (1,2) tau txais los ntawm cov ntaub ntawv haum ntawm Soref thiab Bennett ntawm lub wavelength ntawm 1550 nanometers . Piv nrog rau cov hluav taws xob, qhov ua rau muaj qhov loj dua ntawm qhov kev hloov pauv ntawm qhov tseeb thiab qhov kev xav ntawm kev xav, uas yog, lawv tuaj yeem tsim qhov hloov pauv loj dua rau kev hloov pauv, yog li hauvMach-Zehnder modulatorsthiab nplhaib modulators, nws yog feem ntau nyiam siv qhov uatheem modulators.

Qhov ntau yamsilicon (Si) modulatorhom muaj nyob hauv daim duab 10A. Nyob rau hauv lub cab kuj txhaj tshuaj modulator, lub teeb nyob rau hauv intrinsic silicon nyob rau hauv ib tug dav tus pin hlws ris, thiab electrons thiab qhov yog txhaj. Txawm li cas los xij, xws li modulators qeeb qeeb, feem ntau nrog lub bandwidth ntawm 500 MHz, vim tias dawb electrons thiab qhov yuav siv sij hawm ntev dua los rov ua dua tom qab txhaj tshuaj. Yog li ntawd, cov qauv no feem ntau yog siv los ua qhov sib txawv ntawm qhov kho qhov muag attenuator (VOA) es tsis yog modulator. Nyob rau hauv ib tug carrier depletion modulator, lub teeb feem nyob rau hauv ib tug nqaim pn hlws ris, thiab depletion dav ntawm pn hlws ris yog hloov los ntawm ib tug siv hluav taws xob teb. Cov modulator no tuaj yeem ua haujlwm ntawm qhov nrawm tshaj li 50Gb / s, tab sis muaj qhov poob siab tom qab. Tus qauv vpil yog 2 V-cm. Ib qho hlau oxide semiconductor (MOS) (qhov tseeb semiconductor-oxide-semiconductor) modulator muaj ib txheej oxide nyias hauv pn hlws ris. Nws tso cai rau qee cov cab kuj sib sau ua ke nrog rau cov neeg nqa khoom depletion, tso cai rau VπL me dua li ntawm 0.2 V-cm, tab sis muaj qhov tsis zoo ntawm kev poob qis dua qhov muag thiab ntau dua capacitance ib chav tsev ntev. Tsis tas li ntawd, muaj SiGe hluav taws xob nqus modulators raws li SiGe (silicon Germanium alloy) band ntug txav. Tsis tas li ntawd, muaj graphene modulators uas tso siab rau graphene hloov ntawm absorbing hlau thiab pob tshab insulators. Cov no qhia tau hais tias muaj ntau hom kev siv ntawm cov txheej txheem sib txawv kom ua tiav high-speed, qis-tsawg optical teeb liab modulation.

Daim duab 10: (A) Cov duab kos duab ntawm ntau yam silicon-based optical modulator designs thiab (B) cross-sectional diagram of optical detector designs.

Ob peb silicon-raws li lub teeb ntes tau pom hauv daim duab 10B. Cov khoom siv absorbing yog germanium (Ge). Ge muaj peev xwm nqus tau lub teeb ntawm wavelengths mus txog 1.6 microns. Qhia rau sab laug yog qhov kev lag luam zoo tshaj plaws tus pin qauv niaj hnub no. Nws yog tsim los ntawm P-hom doped silicon uas Ge hlob. Ge thiab Si muaj 4% lattice mismatch, thiab thiaj li yuav txo tau qhov dislocation, ib txheej nyias ntawm SiGe yog thawj zaug loj hlob raws li ib txheej tsis. N-hom doping yog ua nyob rau sab saum toj ntawm Ge txheej. Ib tug hlau-semiconductor-hlau (MSM) photodiode yog qhia nyob rau hauv nruab nrab, thiab ib tug APD (Lub avalanche Photodetector) yog qhia rau sab xis. Thaj av avalanche hauv APD yog nyob rau hauv Si, uas muaj cov suab nrov qis dua piv rau thaj av avalanche hauv pawg III-V cov ntaub ntawv tseem ceeb.

Tam sim no, tsis muaj kev daws teeb meem nrog cov txiaj ntsig pom tseeb hauv kev sib koom ua ke kho qhov muag nrog silicon photonics. Daim duab 11 qhia tau hais tias muaj ntau yam kev xaiv uas tau tsim los ntawm qib sib dhos. Nyob rau sab laug yog cov monolithic kev koom ua ke uas suav nrog kev siv epitaxially zus germanium (Ge) ua cov khoom siv kho qhov muag, erbium-doped (Er) iav waveguides (xws li Al2O3, uas yuav tsum tau siv kho qhov muag), thiab epitaxially zus gallium arsenide (GaAs). ) quantum dots. Cov kab tom ntej no yog wafer rau wafer sib dhos, koom nrog oxide thiab organic bonding hauv III-V pawg nce cheeb tsam. Cov kab tom ntej no yog chip-rau-wafer sib dhos, uas suav nrog embedding III-V pawg nti rau hauv kab noj hniav ntawm silicon wafer thiab tom qab ntawd machining cov qauv waveguide. Qhov kom zoo dua ntawm thawj peb kab mus kom ze yog tias cov cuab yeej tuaj yeem ua haujlwm tau zoo hauv lub wafer ua ntej txiav. Sab xis-feem ntau yog chip-rau-chip sib dhos, suav nrog kev sib txuas ncaj qha ntawm silicon chips rau III-V pawg chips, nrog rau kev sib txuas ntawm lub lens thiab grating couplers. Qhov sib txawv ntawm cov ntawv thov kev lag luam yog txav los ntawm sab xis mus rau sab laug ntawm daim ntawv qhia mus rau ntau qhov kev sib koom ua ke thiab kev daws teeb meem.

Daim duab 11: Yuav ua li cas kho qhov muag tau muab tso rau hauv silicon-based photonics. Thaum koj txav los ntawm sab laug mus rau sab xis, qhov chaw tsim khoom ntxig maj mam txav rov qab rau hauv cov txheej txheem.