Tus qauv ntawm Ingaas photodetector

Tus qauv ntawmIngaas photodetector

Txij li thaum 1980s, cov kws tshawb nrhiav hauv tsev thiab txawv teb chaws tau kawm cov qauv ntawm ingaas photodetectors, uas feem ntau muab faib ua peb hom. Lawv yog ingaas hlau-semiconductor-hlau photodetector (MSM-PD), ingaas avalanche photodetector (AFD-Pd). Muaj ntau qhov sib txawv hauv cov txheej txheem fabrication thiab tus nqi ntawm ingaas photodetectors nrog cov qauv sib txawv, thiab tseem muaj qhov sib txawv ntawm kev ua haujlwm ntaus ntawv.

The ingaas hlau-semiconductor-hlauphotodetector, qhia hauv daim duab (a), yog tus qauv tshwj xeeb raws li Scottky kev sib tshuam. Xyoo 1992, Shi li al. Siv cov khoom siv qis dua hlau-Organic Vapor Payase Epitaxy Technology (LP-Faibxy) kom muaj qhov siab tshaj plaws ntawm 1.3 μm thiab qis dua qis dua 5.6 PA / μm² ntawm 1.5 V. xyoo 1996, Zhang li al. Siv roj theem molecular nqaj xaiv (GSMBE) kom loj hlob ntawm inalas-ingaas-inp aypaxy txheej. Cov txheej txheem inalas qhia cov yam ntxwv muaj txiaj ntsig zoo, thiab cov txheej txheem kev sib txawv ntawm cov txheej txheem ntawm ingaas thiab inalas txheej tau nyob hauv thaj tsam ntawm 1 × 10⁻ × ×⁻ ×. Qhov no ua rau cov khoom siv tau zoo nrog tsaus nti 0.75 teev tsaus ntuj ntawm 5 v thiab yooj yim rau tag nrho, kom muaj kev sib sau tau yooj yim, qhia tau qis tsaus tam sim no (PA Kev txiav txim), tab sis cov hlau hluav taws xob yuav txo qhov chaw ua kom haum ntawm qhov chaw ntawm lub cuab yeej, yog li cov lus teb yuav qis dua lwm cov qauv.

Ingaas Pin photoDetector txheej ntawm P-hom kev sib tiv tauj ntawm cov duab, yog li muaj nyob hauv cov duab depetion, yog li radiation ntau electron-qhov khub thiab sib sau a Cov ntaub ntawv loj dua, yog li nws tau muaj hluav taws xob hluav taws xob zoo. Nyob rau xyoo 2007, A.Poloczek li al. Siv mbe los cog cov txheej qis-kub tsis zoo los txhim kho cov npoo av thiab kov yeej txoj kev sib dhos ntawm SI thiab INP. MOCVD tau siv los ua ke Ingaas tus lej ntawm INP substrate, thiab cov lus teb ntawm lub cuab yeej tau hais txog 0.57A / W. Hauv 2011, Cov Tub Rog Kev Tshawb Fawb Kuaj (KID) Siv tus lej PNOADETS, thiab kev txheeb xyuas lub hom phiaj tsis sib xws, thiab cov roj ntsha tsawg tsawg tshaj plaws uas Loj dua txhim kho lub teeb liab-rau-suab nrov sib piv ntawm Ingaas Pin photodetector. Ntawm lub hauv paus no, yav 2012, alent siv no lub hau voos rau cov neeg hlau, nrog kev kuaj pom ntau tshaj 50 m thiab ib qho kev daws teeb meem ntawm 256 × 128.

Lub ingaasAvalanche photodetectoryog hom photodetector nrog nce, cov qauv ntawm uas tau qhia hauv daim duab (c). Lub tshuab hluav taws xob-lub qhov ua kom muaj zog txaus hauv qab ntawm cov hluav taws xob, yog tsim cov khoom siv hluav taws xob ob npaug, tsim cov khoom siv tsis zoo, thiab muab cov khoom siv tsis sib xws, thiab muab cov khoom siv sib luag hauv cov khoom siv Cov. Nyob rau hauv 2013, George M Siv Mbe mus cog lus Lattice matched ingaas thiab doping hauv uncoycious lub zog hluav taws xob kom ua rau hluav taws xob cantroshock ionization thaum rho tawm lub qhov ionization. Ntawm cov zis sib npaug ntawm cov paib, APD qhia cov suab qis thiab tsaus nti tam sim no. Xyoo 2016, Hnub Jianfeng li al. Ua ib pawg ntawm 1570 NM Laser nquag sim platform raws li ingaas avalanche photodetector. Sab hauv Circuit Court ntawmAd PhotodetectorTau txais echoes thiab ncaj qha cov zis digital cov cim, ua tiav tag nrho cov cuab yeej sib tw. Cov txiaj ntsig sim tau pom hauv Daim Duab. (d) thiab (e). Daim duab (d) yog lub cev lub cev ntawm lub hom phiaj xav tau, thiab daim duab (e) yog peb-seem deb daim duab. Nws tuaj yeem pom meej meej tias lub qhov rai thaj chaw C muaj qee qhov tob nrug nrog thaj chaw a thiab b. Lub platform pom tias cov mem tes dav tsawg dua 10 ns, ib qho kev hloov kho lub cev (1 ~ 3) Ua tsaug rau Apd cov ntawv teb sab hauv, kev teb kom loj dua, yog li tus nqi qis thiab tus nqi qis thiab tus nqi qis dua qub

Zuag qhia tag nrho, nrog kev loj hlob sai ntawm ingaas npaj thev naus laus zis hauv tsev, MOCVD, peb tuaj yeem siv cov txheej txheem loj thiab lwm yam los npaj cov txheej txheem loj ingaas Ingaas photodetectors tsis tshua tsaus nti thiab muaj qhov tsaus ntuj tsis tshua muaj siab dua 0.57 A / W, thiab muaj cov lus teb nrawm nrawm (PS xaj). Txoj kev txhim kho yav tom ntej ntawm Ingaas photodetectors yuav tsom rau ob yam hauv qab no: (1) ingaas cov txheej uas tau loj hlob ntawm si substrate. Tam sim no, feem ntau ntawm cov khoom siv microelectronic hauv kev ua lag luam yog Si raws, thiab cov txuas ntxiv kev txhim kho kev txhim kho hauv ingaas thiab SI los yog tus qauv dav dav. Kev daws teeb meem xws li kev siv hluav taws xob lattice thiab cov kev nthuav dav thermal sib txawv yog qhov tseem ceeb rau kev kawm txog ingaas / Si; (2) Lub 1550 nm wavelength Technology tau raug paub tab, thiab nthwv wavelength (2.0 ~ 2.5) μm yog kev tshawb nrhiav yav tom ntej. Nrog rau kev nce hauv cov khoom siv, latift tsis sib xws ntawm inp substrate thiab ingaas penitaxial txheej, thiab nws yog qhov txo cov khoom siv ua kom zoo nkauj tam sim no.