42.7 Gbit/S Electro-Optic Modulator hauv Silicon Technology

Ib qho ntawm cov khoom tseem ceeb tshaj plaws ntawm lub modulator optical yog nws qhov ceev modulation lossis bandwidth, uas yuav tsum tsawg kawg yog ceev npaum li cov khoom siv hluav taws xob muaj. Transistors muaj transit frequencies zoo dua 100 GHz twb tau pom hauv 90 nm silicon technology, thiab qhov ceev yuav nce ntxiv raws li qhov tsawg kawg nkaus feature loj raug txo [1]. Txawm li cas los xij, bandwidth ntawm cov modulators silicon-based niaj hnub no yog txwv. Silicon tsis muaj χ (2) -nonlinearity vim nws cov qauv crystalline centro-symmetric. Kev siv cov strained silicon tau ua rau muaj cov txiaj ntsig zoo twb [2], tab sis cov nonlinearities tseem tsis tau tso cai rau cov khoom siv ua tau zoo. Yog li ntawd, cov khoom siv silicon photonic modulators tseem vam khom rau kev faib tawm dawb hauv pn lossis pin junctions [3–5]. Forward biased junctions tau pom tias muaj cov khoom voltage-ntev tsawg li VπL = 0.36 V mm, tab sis qhov ceev modulation yog txwv los ntawm cov dynamics ntawm cov neeg nqa khoom tsawg. Txawm li cas los xij, cov ntaub ntawv tus nqi ntawm 10 Gbit / s tau tsim los ntawm kev pab los ntawm kev ua ntej ntawm lub teeb liab hluav taws xob [4]. Siv cov kev sib tshuam rov qab sib txawv, qhov bandwidth tau nce mus txog li 30 GHz [5,6], tab sis cov khoom voltagelength nce mus rau VπL = 40 V mm2. Hmoov tsis zoo, cov plasma effect phase modulators zoo li no tsim cov kev hloov kho tsis xav tau [7], thiab lawv teb tsis ncaj rau qhov voltage siv. Cov hom ntawv hloov kho siab heev xws li QAM xav tau, txawm li cas los xij, kev teb ncaj qha thiab kev hloov kho theem ntshiab, ua rau kev siv cov nyhuv electro-optic (Pockels effect [8]) tshwj xeeb tshaj yog xav tau.

2. Txoj kev SOH
Tsis ntev los no, txoj kev siv silicon-organic hybrid (SOH) tau raug pom zoo [9–12]. Ib qho piv txwv ntawm SOH modulator tau pom hauv daim duab 1 (a). Nws muaj ib lub qhov waveguide uas coj lub teeb pom kev zoo, thiab ob lub silicon strips uas txuas lub teeb pom kev zoo rau cov electrodes hlau. Cov electrodes nyob sab nraud lub teeb pom kev zoo modal kom tsis txhob muaj kev poob teeb pom kev zoo [13], daim duab 1 (b). Lub cuab yeej no tau coated nrog cov khoom siv electro-optic organic uas sib npaug zos rau hauv qhov. Lub zog modulating yog nqa los ntawm lub teeb hluav taws xob hlau thiab poob tawm hla qhov qhov ua tsaug rau cov silicon strips conductive. Lub teeb hluav taws xob tom qab ntawd hloov cov ntsuas ntawm refraction hauv qhov qhov los ntawm cov nyhuv ultra-fast electro-optic. Txij li thaum qhov qhov muaj qhov dav hauv qhov kev txiav txim ntawm 100 nm, ob peb volts txaus los tsim cov teb modulating muaj zog heev uas nyob rau hauv qhov kev txiav txim ntawm qhov loj ntawm lub zog dielectric ntawm feem ntau cov ntaub ntawv. Cov qauv muaj kev ua haujlwm siab modulation txij li thaum ob qho tib si modulating thiab cov teb optical tau concentrated hauv qhov qhov, daim duab 1 (b) [14]. Tseeb tiag, thawj qhov kev siv ntawm SOH modulators nrog kev ua haujlwm sub-volt [11] twb tau pom lawm, thiab sinusoidal modulation txog li 40 GHz tau pom [15,16]. Txawm li cas los xij, qhov kev sib tw hauv kev tsim cov modulators SOH qis-voltage ceev yog los tsim cov hlua txuas hluav taws xob siab heev. Hauv lub voj voog sib npaug, qhov slot tuaj yeem sawv cev los ntawm lub capacitor C thiab cov hlua hluav taws xob los ntawm resistors R, Daim duab 1 (b). Lub sijhawm RC sib xws txiav txim siab qhov bandwidth ntawm lub cuab yeej [10,14,17,18]. Txhawm rau kom txo qhov tsis kam R, nws tau raug pom zoo kom dope cov hlua silicon [10,14]. Thaum doping ua rau muaj kev coj ua ntawm cov hlua silicon (thiab yog li ntawd ua rau muaj kev poob ntawm qhov muag), ib tus them tus nqi poob ntxiv vim tias kev txav mus los ntawm hluav taws xob raug cuam tshuam los ntawm kev tawg ntawm cov khoom tsis huv [10,14,19]. Ntxiv mus, qhov kev sim tsim khoom tsis ntev los no tau qhia txog kev coj ua qis tsis tau xav txog.

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Beijing Rofea Optoelectronics Co., Ltd. nyob hauv Suav teb "Silicon Valley" - Beijing Zhongguancun, yog ib lub tuam txhab high-tech uas mob siab rau kev pabcuam rau cov tsev kawm ntawv tshawb fawb hauv tsev thiab txawv teb chaws, cov tsev kawm ntawv tshawb fawb, cov tsev kawm qib siab thiab cov neeg ua haujlwm tshawb fawb txog kev lag luam. Peb lub tuam txhab feem ntau koom nrog kev tshawb fawb thiab kev txhim kho ywj pheej, tsim qauv, tsim khoom, muag khoom ntawm cov khoom optoelectronic, thiab muab cov kev daws teeb meem tshiab thiab kev pabcuam tus kheej rau cov kws tshawb fawb thiab cov kws ua haujlwm hauv kev lag luam. Tom qab ntau xyoo ntawm kev tsim kho tshiab ywj pheej, nws tau tsim cov khoom lag luam photoelectric nplua nuj thiab zoo meej, uas siv dav hauv nroog, tub rog, kev thauj mus los, hluav taws xob, nyiaj txiag, kev kawm, kev kho mob thiab lwm yam lag luam.

Peb tab tom nrhiav rau pem hauv ntej rau kev koom tes nrog koj!


Lub sijhawm tshaj tawm: Lub Peb Hlis-29-2023