Ib qho tseem ceeb tshaj plaws ntawm cov khoom siv kho qhov muag yog nws qhov kev hloov kho qhov nrawm lossis bandwidth, uas yuav tsum muaj tsawg kawg yog ceev raws li cov khoom siv hluav taws xob muaj.Cov transistors uas muaj kev thauj mus los zoo tshaj 100 GHz twb tau pom nyob rau hauv 90 nm silicon thev naus laus zis, thiab qhov ceev yuav nce ntxiv vim qhov tsawg kawg nkaus feature loj yog txo [1].Txawm li cas los xij, qhov bandwidth ntawm niaj hnub silicon-based modulators yog txwv.Silicon tsis muaj χ(2)-nonlinearity vim nws centro-symmetric crystalline qauv.Kev siv cov strained silicon tau ua rau cov txiaj ntsig tau nthuav dav lawm [2], tab sis cov nonlinearities tseem tsis tau tso cai rau cov cuab yeej siv tau.Lub xeev-of-the art silicon photonic modulators yog li tseem cia siab rau cov neeg nqa khoom pub dawb hauv pn lossis pin junctions [3–5].Forward biased junctions tau pom tias muaj cov khoom siv hluav taws xob ntev li tsawg li VπL = 0.36 V mm, tab sis qhov kev hloov pauv ceev yog txwv los ntawm kev ua haujlwm ntawm cov neeg nqa khoom tsawg.Tseem, cov ntaub ntawv tus nqi ntawm 10 Gbit / s tau tsim nrog kev pab los ntawm qhov tseem ceeb ua ntej ntawm lub teeb liab hluav taws xob [4].Siv cov kev sib tw rov qab hloov pauv, qhov bandwidth tau nce mus txog 30 GHz [5,6], tab sis cov khoom siv hluav taws xob tau nce mus rau VπL = 40 V mm.Hmoov tsis zoo, xws li cov nyhuv plasma theem modulators tsim qhov tsis xav siv kev hloov kho ib yam nkaus [7], thiab lawv teb tsis tau raws li qhov siv hluav taws xob.Advanced modulation formats zoo li QAM xav tau, txawm li cas los xij, cov lus teb tawm thiab cov theem ntshiab kev hloov kho, ua rau kev siv cov nyhuv electro-optic (Pockels effect [8]) qhov xav tau tshwj xeeb.
2. SOH mus kom ze
Tsis ntev los no, txoj hauv kev silicon-organic hybrid (SOH) tau pom zoo [9–12].Ib qho piv txwv ntawm SOH modulator muaj nyob rau hauv daim duab 1(a).Nws muaj ib lub qhov waveguide coj qhov chaw kho qhov muag, thiab ob lub silicon strips uas hluav taws xob txuas lub qhov muag waveguide rau cov hlau electrodes.Cov electrodes nyob sab nraum qhov kho qhov muag modal teb kom tsis txhob kho qhov muag poob [13], Fig. 1(b).Cov cuab yeej yog coated nrog cov khoom siv electro-optic organic uas uniformly sau lub qhov.Lub modulating voltage yog nqa los ntawm lub metallic hluav taws xob waveguide thiab poob tawm thoob plaws hauv lub qhov ua tsaug rau cov conductive silicon strips.Qhov tshwm sim hluav taws xob tom qab ntawd hloov qhov ntsuas ntawm refraction hauv lub qhov los ntawm ultra-ceev electro-optic nyhuv.Txij li thaum lub qhov muaj qhov dav nyob rau hauv qhov kev txiav txim ntawm 100 nm, ob peb volts yog txaus los tsim kom muaj zog modulating teb uas yog nyob rau hauv qhov kev txiav txim ntawm magnitude ntawm lub zog dielectric ntawm feem ntau cov ntaub ntawv.Cov qauv muaj kev ua haujlwm siab zoo vim tias ob qho tib si modulating thiab cov chaw kho qhov muag yog cov concentrated hauv lub qhov, daim duab 1(b) [14].Tseeb, thawj qhov kev siv ntawm SOH modulators nrog sub-volt ua haujlwm [11] twb tau qhia, thiab sinusoidal modulation mus txog 40 GHz tau pom [15,16].Txawm li cas los xij, qhov kev sib tw hauv kev tsim qis-voltage high-speed SOH modulators yog los tsim kom muaj kev sib txuas zoo heev.Nyob rau hauv ib qho sib npaug Circuit Court qhov yuav sawv cev los ntawm ib tug capacitor C thiab cov conductive strips los ntawm resistors R, daim duab 1(b).Lub sij hawm RC sib txuas mus tas li txiav txim siab bandwidth ntawm lub cuab yeej [10,14,17,18].Txhawm rau txo qhov tsis kam R, nws tau raug pom zoo kom dope cov silicon strips [10,14].Thaum doping tsub kom cov conductivity ntawm silicon strips (thiab yog li ntawd nce kho qhov muag losses), ib tug them ib tug ntxiv poob nplua vim hais tias cov electron kev mus los yog impaired los ntawm impurity tawg [10,14,19].Tsis tas li ntawd, cov kev sim fabrication tsis ntev los no qhia tau tias tsis tshua muaj conductivity.
Beijing Rofea Optoelectronics Co., Ltd. nyob rau hauv Tuam Tshoj lub "Silicon Valley" - Beijing Zhongguancun, yog ib tug high-tech enterprise mob siab rau ua hauj lwm nyob rau hauv lub domestic thiab txawv teb chaws kev tshawb fawb cov koom haum, kev tshawb fawb institutes, universities thiab enterprise scientific kev tshawb fawb neeg ua hauj lwm.Peb lub tuam txhab feem ntau yog koom nrog kev tshawb fawb ywj pheej thiab kev tsim kho, tsim, tsim khoom, muag khoom ntawm optoelectronic cov khoom, thiab muab cov kev daws teeb meem tshiab thiab kev tshaj lij, kev pabcuam tus kheej rau cov kws tshawb fawb tshawb fawb thiab cov kws tshaj lij.Tom qab xyoo ntawm kev ywj pheej innovation, nws tau tsim ib tug nplua nuj thiab zoo meej series ntawm photoelectric khoom, uas yog dav siv nyob rau hauv lub nroog, tub rog, tsheb thauj mus los, hluav taws xob fais fab, nyiaj txiag, kev kawm, kev kho mob thiab lwm yam lag luam.
Peb tab tom tos ntsoov rau kev koom tes nrog koj!
Post lub sij hawm: Mar-29-2023